Abstract
Photonic crystal waveguides in InP-based heterostructures are studied experimentally and theoretically. The waveguides are fabricated in an InP/GaInAsP/InP low index contrast heterostructure using Ar/Cl2 Chemical Assisted Ion Beam Etching, and characterized using the end-fire method. The obtained experimental near-infrared transmission spectra are further analyzed by comparing with theoretical results calculated by the finite-difference time-domain method. A loss of 1 dB/100 μm in the photonic crystal waveguides is demonstrated. The mini-stop bands, positioned in agreement with our theory, are observed. In-plane cavities with photonic crystal boundaries inside the waveguide are also realized. A quay factor of 400 for a 6 μm long cavity is obtained.
Original language | English |
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Pages (from-to) | 22-31 |
Number of pages | 10 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4905 |
DOIs | |
State | Published - 2002 |
Externally published | Yes |
Event | Materials and Devices for optical and Wireless Communications - Shanghai, China Duration: Oct 15 2002 → Oct 18 2002 |
Keywords
- Heterostructures
- InP
- Photonic band gap materials
- Photonic crystals
- Waveguides