High aspect ratio etching and characterization of 2D-photonic crystals in InP/InGaAsP/InP heterostructures

  • S. Anand
  • , M. Qiu
  • , M. Mulot
  • , M. Swillo
  • , B. Jaskorzynska
  • , A. Karlsson

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

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Engineering

Physics

Material Science