Abstract
We report on the fabrication and characterization of 2D photonic crystals (PhCs) in InP/InGaAsP/InP heterostructures. It is demonstrated that Ar/Cl2 based chemically assisted ion beam etching (CAIBE) is a very promising method to obtain high aspect ratio etching of PhCs in the InP-based materials. With this process, it is possible to obtain PC-holes as deep as 3 microns even for feature (PhC-hole) sizes as small as 200-250 nm. The optical characteristics of the fabricated PhC-based elements/devices such as line-defect waveguides, in-plane resonant cavities and drop-filter based on contra-directional coupling will be reported. The devices were measured using end-fire coupling and the obtained results were simulated using the 2D finite difference time domain (FDTD) method including an effective loss-approximation. The etched PhC-waveguides show low transmission losses, less than 1 dB/100 μm. A quality factor of 400 for a 6 micron long cavity with 6-hole mirrors is obtained. Finally, drop-functionality in a PhC-based filter using contra-directional coupling is demonstrated.
| Original language | English |
|---|---|
| Pages (from-to) | 78-89 |
| Number of pages | 12 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5277 |
| DOIs | |
| State | Published - 2004 |
| Externally published | Yes |
| Event | Photonics: Design, Technology, and Packaging - Perth, WA, Australia Duration: Dec 10 2003 → Dec 12 2003 |
Keywords
- Chemically assisted ion beam etching
- Drop filters
- InP
- Optical cavities
- Optical filters
- Photonic crystal waveguides
- Photonic crystals
- Reactive ion beam etching